Untersuchungen zur rasterkraft- und konfokalmikroskopischen Charakterisierung nanometrologischer Referenzkörper

Description

Highly accurate manufacturing technologies pose an enormous challenge for dimensional metrology. Due to the lack of suitable sensor systems, measurements on complex geometries with target uncertainties in the nanometre-range are still a largely unresolved problem. This is mainly caused by a lack of highly accurate measurement procedures to calibrate micro-dimensional reference bodies in terms of their coarse and fine form. This thesis presents and examines two procedures that might be applied for the nanometrological calibration of reference bodies. Firstly, a scanning force microscope with an adjustable probe direction to calibrate the fine form and secondly, the bidirectional confocal microscopy to calibrate the coarse form of nanometrological reference bodies.